Научная деятельность

Автор более 40 научных работ, в том числе 8 патентов на изобретение. Ответственный исполнитель и руководитель НИР, результаты которых внедрены на предприятиях и в учебный процесс.

Научное направление: 05.27.06 – технология и оборудование для производства полупроводников, материалов и приборов электронной техники

WoS Researcher ID E-6255-2014

Scopus Author ID 36149202100

Области научных интересов:

Перспективные технологические процессы микро- и наноэлектроники, новые материалы для наноэлектронных приборов, в частности: химическое осаждение из газовой фазы, осаждение тонких пленок, углеродные наноматериалы, наноструктурные материалы, синтез наночастиц и нанопроволок, наноматериалы для энергетики, эмиссионные структуры, аддитивные технологии

Патенты:

1. Гаврилов С.А., Громов Д.Г., Дубков С.В., Миронов А.Е., Шулятьев А.С. Способ изготовления межсоединений полупроводникового прибора. №2421847. 20.06.2011

2. Гаврилов С.А., Громов Д.Г., Дубков С.В., Миронов А.Е., Шулятьев А.С. Способ изготовления упорядоченных наноструктур. №2462785. 27.09.2012

3. Громов Д.Г., Дубков С.В., Шулятьев А.С., Лебедев Е.А., Миронов А.Е. Способ изготовления планарного конденсатора повышенной емкости. №2533010. 18.09.2014.

4. Рогачев М.С., Громов Д.Г., Штерн Ю.И., Дубков С.В., Штерн М.Ю. Способ получения термоэлектрического элемента. № RU 2601243. 2016.

5. Шулятьев А.С., Лебедев Е.А., Громов Д.Г., Дубков С.В., Рыгалин Б.Н. Способ изготовления межсоединений полупроводниковых приборов. №2593415. Дата выдачи 12.07.2016.

6. Шулятьев А.С., Лебедев Е.А., Громов Д.Г., Дубков С.В., Рыгалин Б.Н. Способ изготовления межсоединений полупроводниковых приборов. №2593416. Дата выдачи 12.07.2016.

7. С.А. Гаврилов, Д.Г. Громов, С.В. Дубков, А.Е. Миронов, А.С. Шулятьев. Способ изготовления планарного конденсатора повышенной емкости. № 2533010, Год: 11/2014

8. Дубков С.В., Громов Д.Г., Шерченков А.А., Штерн Ю.И., Гаврилов С.А., Лебедев Е.А., Дронов А.А. Автономный портативный термоэлектрический источник питания. Патент на изобретение № 2658494 (2017)

Научные статьи:

1. Dubkov S, Gromov D, Savitskiy A, Trifonov A, Gavrilov S. Alloying effects at bicomponent au-cu and in-sn particle arrays formation by vacuum-thermal evaporation. Mater Res Bull. 2019;112:438-44.

2. Karpinsky DV, Troyanchuk IO, Trukhanov AV, Willinger M, Khomchenko VA, Kholkin AL, Sikolenko V, Maniecki T, Maniukiewicz W, Dubkov SV, Silibin MV. Structure and piezoelectric properties of sm-doped BiFeO3 ceramics near the morphotropic phase boundary. Mater Res Bull. 2019;112:420-5.

3. Khomchenko VA, Ivanov MS, Karpinsky DV, Dubkov SV, Silibin MV, Paixão JA. Weak ferromagnetic state in the polar phase of Bi1−xCaxFe1−x/2Nbx/2O3 multiferroics. Mater Lett . 2019;235:46-8.

4. Wojtaś M, Karpinsky DV, Silibin MV, Gavrilov SA, Sysa AV, Nekludov KN, Dubkov SV. Pyroelectricity in graphene oxide doped P(VDF-TrFE) films. Polym Test [Internet]. 2018;71:296-300.

5. Mierczynski P, Mierczynska A, Ciesielski R, Maniukiewicz W, Rogowski J, Maniecki TP, Dubkov S, Sysa A, Gromov D, Szynkowska MI, Vasilev K. Modern ni and Pd–Ni catalysts supported on Sn–Al binary oxide for oxy-steam reforming of methanol. Energy Technol. 2018;6(9):1687-99

6. Mierczynski P, Dawid B, Maniukiewicz W, Mosinska M, Zakrzewski M, Ciesielski R, Kedziora A, Dubkov S, Gromov D, Rogowski J, Witonska I, Szynkowska MI, Maniecki T. Fischer–Tropsch synthesis over various Fe/Al2O3–Cr2O3 catalysts. React Kinet Mech Catal. 2018;124(2):545-61.

7. Mierczynski P, Ciesielski R, Zakrzewski M, Dawid B, Mosinska M, Kedziora A, Maniukiewicz W, Dubkov S, Gromov D, Szynkowska M, Witonska I, Shtyka O, Maniecki T. Supported Ru−Ni catalysts for biogas and biohydrogen conversion into syngas. Kinet Catal. 2018;59(4):509-13.

8. Volkov RL, Borgardt NI, Gromov DG, Dubkov SV. Electron diffraction analysis of the structure of carbon nanopillars along the growth direction. J Surf Invest. 2018;12(3):473-9

9. Mierczynski P, Ciesielski R, Zakrzewski M, Dawid B, Mosinska M, Maniukiewicz W, Dubkov S, Gromov D, Szynkowska MI, Witonska I, Shtyka O, Maniecki T. Carbon deposits formed on the surface of Ru–Ni catalysts during the mixed reforming of methane process. Kinet Catal. 2018;59(3):372-7.

10. Mierczynski P, Dubkov SV, Bulyarskii SV, Pavlov AA, Skorik SN, Trifonov AY, Mierczynska A, Kitsyuk EP, Gavrilov SA, Maniecki TP, Gromov DG. Growth of carbon nanotube arrays on various CtxMey alloy films by chemical vapour deposition method. J Mater Sci Technol. 2018;34(3):472-80.

11. Dubkov S, Trifonov A, Shaman Y, Kitsyuk E, Savitskiy A, Polokhin A, Gromov D. SERS of A-C thin film on ag, au, Ag0.52-Au0.48 alloy nanoparticle arrays with normal particles size distribution formed by vacuum thermal evaporation. Defect Diffus Forum. 2018;386 DDF:250-5.

12. Troyanchuk IO, Karpinsky DV, Tereshko NV, Bushinsky MV, Sikolenko VV, Gavrilov SA, Dubkov SV, Silibin MV. Ferromagnetic-antiferromagnetic transition and magnetotransport properties of La0.7Sr0.3Mn1-xNixO3 perovskites. Mater Res Express. 2017;4(10)

13. Gavrilin IM, Gromov DG, Dronov AA, Dubkov SV, Volkov RL, Trifonov AY, Borgardt NI, Gavrilov SA. Effect of electrolyte temperature on the cathodic deposition of ge nanowires on in and sn particles in aqueous solutions. Semiconductors 2017;51(8):1067-71.

14. Gromov D, Dubkov S, Savitskiy A, Grishina Y, Rubtsov V. Investigation of Ag nanoparticles fusion process by subsequent vacuum thermal evaporation. In: Proceedings of the 2017 IEEE Russia Section Young Researchers in Electrical and Electronic Engineering Conference, ElConRus 2017; 20172017. p. 1156-9. 10.1109/EIConRus.2017.7910763

15. Dubkov S, Trifonov A, Kitsyuk E, Pavlov A, Bulyarsky S, Skorik S, Maniecki T, Mierczynski P, Gromov D, Gavrilov S. CVD-growth of MWCNT arrays on Me-Ct-N-(O) thin films. In: Journal of Physics: Conference Series DOI: 10.1088/1742-6596/829/1/012002

16. Gromov DG, Bulyarskii SV, Dubkov SV, Pavlov AA, Skorik SN, Trifonov AY, Shulyat'ev AS, Shaman YP, Kitsyuk EP, Dudin AA, Sirotina AP, Gavrilov SA. CVD-growth of CNT with the use of catalutic Ct–Me–N–O thin films incorporated in the technology. Russ Microelectr. 2017;46(2):75-81.

17. Grishina YS, Borgardt NI, Volkov RL, Gromov DG, Dubkov SV. Electron microscopy studies of crystallites in carbon nanopillars grown by low-temperature plasma-enhanced chemical-vapor deposition. J Surf Invest . 2017;11(1):226-33.

18. Troyanchuk IO, Karpinsky DV, Silibin MV, Garvilov SA, Dubkov SV, Sikolenko VV. Magnetic properties, magnetoresistance and functionality of perovskite manganese oxides In: Smart Materials for Smart Living ; 2017 p. 173-90.

19. Mierczynski P, Shtyka O, Kozanecki M, Filipczak P, Maniukiewicz W, Gromov DG, Dubkov SV, Sysa AV, Trifonov AY, Czylkowska A, Szynkowska MI, Maniecki TP. Effect of the AACVD based synthesis atmosphere on the structural properties of multi-walled carbon nanotubes. Arab J Chem 2017

20. Gromov DG, Dubkov SV, Pavlov AA, Skorik SN, Trifonov AY, Kirilenko EP, Shulyat'ev AS, Shaman YP, Rygalin BN. Formation of carbon nanotubes on an amorphous Ni25Ta58N17 alloy film by chemical vapor deposition. Semiconductors . 2016;50(13):1748-52.

21. Dubkov S, Trifonov A, Shaman Y, Pavlov A, Shulyat'Ev A, Skorik S, Kirilenko EP, Rygalin B. Growth of vertically aligned multiwalled carbon nanotubes forests on metal alloy Ni-Nb-N with low content of catalyst. In: Journal of Physics: Conference Series DOI: 10.1088/1742-6596/741/1/012030

22. Gromov DG, Dubkov SV, Pavlov AA, Skorik SN, Trifonov AY, Shulyatev AS, Shaman YP, Rygalin BN. Use of thin film of a Co15Ti40N35alloy for CVD catalytic growth of carbon nanotubes. Russ Microelectr. 2016;45(2):98-104.

23. Troyanchuk IO, Lobanovskii LS, Dubkov SV, Shilyaeva YI, Silibin MV, Gavrilov SA. Magnetic properties of cobaltites doped with chromium, gallium, and iron ions. Phys Solid State . 2016;58(2):293-5.

24. Dubkov S, Bulyarskii S, Pavlov A, Trifonov A, Kitsyuk E, Mierczynski P, Maniecki T, Ciesielski R, Gavrilov S, Gromov D. The features of CNT growth on catalyst-content amorphous alloy layer by CVD-method. In: Proceedings of SPIE - The International Society for Optical Engineering; DOI: 10.1117/12.2267052

25. Mierczynski P, Vasilev K, Mierczynska A, Maniukiewicz W, Ciesielski R, Rogowski J, Szynkowska IM, Trifonov AY, Dubkov SV, Gromov DG, Maniecki TP. The effect of gold on modern bimetallic au-Cu/MWCNT catalysts for the oxy-steam reforming of methanol. Catal Sci Technolog. 2016;6(12):4168-83.

26. Gromov D, Borgardt N, Grishina Y, Dedkova A, Kirilenko E, Dubkov S. Study of growth kinetics of amorphous carbon nanopillars formed by PECVD. In: Proceedings of SPIE - The International Society for Optical Engineering DOI: 10.1117/12.2179765

27. Gromov DG, Savitskiy AI, Pavlova LM, Borgardt NI, Grishina YS, Dubkov SV, Trifonov AY. Formation of gold and silver cluster arrays using vacuum-thermal evaporation on a non-heated substrate. In: Proceedings of SPIE - The International Society for Optical Engineering: DOI: 10.1117/12.2180775

28. Gavrilov SA, Gromov DG, Dubkov SV, Nazarkin MY, Silibin MV, Timoshenkov SP, Koz'min AM, Shulyat'ev AS. Study of the vibration-sensitive piezoelectric element based on ZnO nanowires and porous electrode. Russ Microelectr. 2014;43(7):491-5.

29. Gromov DG, Borgardt NI, Volkov RL, Galperin VA, Grishina YS, Dubkov SV. Specific features of the structure and properties of carbon nanocolumns formed by low-temperature chemical vapor deposition. Semiconductors. 2013;47(13):1703-6.

30. Dubkov SV, Gavrilov SA, Gromov DG, Krasulin GA. Low-temperature process of the formation of tubular and graphene carbon structures. Semiconductors. 2011;45(13):1705-8.

31. Gromov DG, Gavrilov SA, Dubkov SV. Formation of carbonic nanostructures using PECVD and glow-discharge plasma at direct current. In: Proceedings of SPIE - The International Society for Optical Engineering DOI: 10.1117/12.854748

32. Gromov DG, Gavrilov SA, Redichev EN, Chulkov IS, Anisimov MY, Dubkov SV, Chulkov SI. Non-monotonic dependence of temperature of au nanometer films dissociation into droplets on their thickness on Al2O3 surface. Appl Phys A. 2010;99(1):67-71.